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Deep ultraviolet Optical Absorption Measuring instrument (PTS-DUV-2000/PTB-DUV-2000) is a highly sensitive precision optical testing instrument developed for the detection and analysis of the absorption characteristics of optical materials and components in deep ultraviolet band based on laser induced photothermal detection technology.
PTS-DUV-2000: applies to detecting/analyzing surface absorption of DUV optical films & materials, covering absorption measurement, uniformity testing, defect analysis, and laser irradiation stability monitoring.
PTB-DUV-2000: is for detecting/analyzing bulk absorption of DUV optical components & materials, covering absorption measurement, uniformity testing, and defect analysis.
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Deep Ultraviolet Optical Absorption Measurement instrument |
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Model |
PTS-DUV-2000 |
PTB-DUV-2000 |
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Detection function |
Surface absorption |
Surface & Bulk absorption |
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Detection mode |
Reflective & Transmissive |
Reflective & Transmissive |
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Absorption detection sensitivity |
≤0.1ppm |
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Detection wavelength |
266nm or customized |
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Maximum scanning spatial resolution |
≤1μm |
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Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.
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Surface absorption and uniformity analysis.1
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Bulk absorption measurement.2
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Microscopic imaging of absorption defects.3
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Thermal conductivity defect imaging.4
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Detection of surface, subsurface, and bulk defects.5
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Real-time monitoring of laser damage and laser pre-treatment.6
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Wafer ion implantation process parameter testing.7
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Stability analysis of materials under laser irradiation.8
Read more
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Optical Absorption Measurement Instrument (Standard Version)
Laser Calorimetric Absorption Measurement instrument
Optical Absorption Measurement Instrument (Simplified Version)
Automated Defect Inspection System For Lenses
Defect Inspection System For Planar Components
Semi-Automatic Defect Inspection System For Lenses
