Hefei ZC Optoelectronic Technology Co., Ltd.
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Deep Ultraviolet Optical Absorption Measurement Instrument

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ProductIntroduction

Deep ultraviolet Optical  Absorption  Measuring instrument (PTS-DUV-2000/PTB-DUV-2000) is a highly sensitive  precision  optical  testing  instrument  developed  for  the  detection  and  analysis  of  the  absorption  characteristics  of  optical  materials  and  components  in  deep  ultraviolet  band  based  on laser induced photothermal detection technology.

PTS-DUV-2000: applies to detecting/analyzing surface absorption of DUV optical films & materials, covering absorption measurement, uniformity testing, defect analysis, and laser irradiation stability monitoring.

PTB-DUV-2000: is for detecting/analyzing bulk absorption of DUV optical components & materials, covering absorption measurement, uniformity testing, and defect analysis.

ProductParameters

Deep Ultraviolet Optical Absorption Measurement instrument

Model

PTS-DUV-2000

PTB-DUV-2000

Detection function

Surface absorption

Surface & Bulk absorption

Detection mode

Reflective & Transmissive

Reflective & Transmissive

Absorption detection sensitivity

≤0.1ppm

Detection wavelength

266nm or customized

Maximum scanning spatial resolution

≤1μm

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.

ProductFeatures
  • Surface absorption and uniformity analysis.
    1
  • Bulk absorption measurement.
    2
  • Microscopic imaging of absorption defects.
    3
  • Thermal conductivity defect imaging.
    4
  • Detection of surface, subsurface, and bulk defects.
    5
  • Real-time monitoring of laser damage and laser pre-treatment.
    6
  • Wafer ion implantation process parameter testing.
    7
  • Stability analysis of materials under laser irradiation.
    8
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