Hefei ZC Optoelectronic Technology Co., Ltd.
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Inspection Equipment For SiC

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ProductIntroduction

Inspection Equipment System For SiC (NOVA-2000) is designed for defect inspection of SiC substrate  wafers and homogeneous epitaxial wafers. It features a dedicated multi-channel optical inspection system and an automatic defect detection and classification algorithm tailored for the diversity of SiC defects.The equipment detects and categorizes defects such as micropipes, stacking faults, triangular defects, step bunching, and more, significantly enhancing SiC quality control and process optimization.

ProductParameters

Inspection Equipment For SiC

Model

NOVA-2000

Wafer Type

SiC Substrate, Epitaxial Wafers

Wafer Size

4 inches, 6 inches, 8 inches

throughput

10WPH (6-inch)

Loading/Unloading

Fully Automated, 2 Loadport, 1 Robot

Operating Temperature

20°C~25°C

Operating Humidity

40%~60%

Cleanroom Class

Class 100 or Higher

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.

ProductFeatures
  • Multi-channel Optical inspection System
    1
  • High Cleanliness Standards
    2
  • Traceable Inspection Data
    3
  • Intuitive Operation Software
    4
  • Real-time Auto-focus
    5
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