Hefei ZC Optoelectronic Technology Co., Ltd.
language
中文
英文

Inspection Equipment For LN/LT Wafers

Consult Now
Warm reminder: If you need to view the attribute differences of specific products, please click "Consult Now" to consult.
ProductIntroduction

Inspection Equipment For LN/LT Wafers (NOVA-2000-LN/LT) is designed for the defect detection of substrate wafers such as lithium niobate and lithium tantalate. It is compatible with various types including blackened, semi-blackened, and fully transparent. The equipment can detect defects such as particles, scratches, pits, bumps, edge chips, and cracks, playing a crucial role in the quality control of wafers.

This system integrates multiple inspection modes such as bright field and dark field, providing reliable defect information for various types of defects. Combined with automatic defect detection and classification algorithms, it extracts defect data including defect type, size, coordinates, and statistical data, generating wafer defect inspection reports for users to assess and determine quality.

ProductParameters

Inspection Equipment For LN/LT Wafers

Model

NOVA-2000-LN/LT

Wafer Type

Polished substrates of lithium niobate (tantalate), blackened, semi-blackened, fully transparent, etc.

Wafer Size

4 inches, 6 inches, 8 inches

Inspection Modes

Bright-Field, Dark-Field

Throughput

≥20WPH (@6-inch wafer resolution 1μm)

 

≥12WPH (@8-inch wafer resolution 1μm)

Automation

2 LoadPort

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.

ProductFeatures
  • High Detection Efficiency
    1
  • High Degree of Automation
    2
  • Customized Clamping Method
    3
  • Background Noise Suppression
    4
  • Intelligent Algorithm
    5
  • Real-time Auto-focus
    6
Related recommendations
Read more
  • Inspection Equipment For SiC

  • Inspection Equipment For Glass Wafers

  • Consult Now
    *
    *
    *
    *
    *
    *
    I agree to the processing and transfer of my personal data to the United States in accordance with the KLA Website Privacy Policy
    I consent to receive marketing and advertising emails from KLA Corporation