Inspection Equipment For LN/LT Wafers (NOVA-2000-LN/LT) is designed for the defect detection of substrate wafers such as lithium niobate and lithium tantalate. It is compatible with various types including blackened, semi-blackened, and fully transparent. The equipment can detect defects such as particles, scratches, pits, bumps, edge chips, and cracks, playing a crucial role in the quality control of wafers.

This system integrates multiple inspection modes such as bright field and dark field, providing reliable defect information for various types of defects. Combined with automatic defect detection and classification algorithms, it extracts defect data including defect type, size, coordinates, and statistical data, generating wafer defect inspection reports for users to assess and determine quality.

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.