Hefei ZC Optoelectronic Technology Co., Ltd.
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Inspection Equipment For Glass Wafers

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ProductIntroduction

Inspection Equipment For Glass Wafers (NOVA-2000-G) is made for finding defects in transparent or semi-transparent wafer substrates, like glass and lithium niobate wafers. It can spot defects such as particles, scratches, pits, bumps, chipped edges, and cracks. This is important for controlling the quality of transparent wafers. The system uses different detection methods,like bright field and dark field. It gives reliable defect info for all kinds of problems. By using automatic defect detection and classification algorithms, it gets defect data such as the type, size, location, and stats. Then it makes a wafer defect report for users to judge the quality.

ProductParameters

Inspection Equipment For Glass Wafers

Model

NOVA-2000-G

Wafer Type

Glass Wafer Substrates, Patterned Wafers

Wafer Size

4 inches, 6 inches, 8 inches, 12 inches (Compatible with adjacent sizes)

Inspection Modes

Bright-field, Dark-field, Differential Interference

Resolution

10μm-0.5μm

Objectives

1X, 2X, 5X, 10X, 20X, 50X

Defect Types

Scratches, pitting, particles, contamination, edge chipping, etc.

Throughput

≥12WPH (@8-inch wafer resolution 1μm)

≥7WPH (@12-inch wafer resolution 1μm)

Automation

2 LoadPort

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.

ProductFeatures
  • Customized Clamping Method
    1
  • Backside Noise Suppression
    2
  • Real-time Automatic Focusing
    3
  • High Automation
    4
  • High Efficiency
    5
  • Intelligent Algorithm
    6
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