The Multimodal Defect Inspection Instrument (MMDI-2000) combines full-aperture rapid defect identification with sub-aperture high-sensitivity, high-resolution microscopic imaging. It statistically analyzes the scale, location, and morphology of defects. Users can employ different detection modalities such as photothermal weak absorption and microscopic imaging to focus on areas of interest and obtain defect information. It can also utilize differential interference combined with microscopic imaging technology to distinguish between bumps and pits.
Multimodal Surface Defect Detector |
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Model |
MMDI-2000 |
Maximum Sample Size |
100mm×100mm (L × W), or customizable |
Detection Modes |
Laser scattering, photothermal absorption, microscopic imaging; |
Defect Sensitivity |
≤0.3μm |
Photothermal Absorption Sensitivity |
≤10ppb |
Photothermal Defect Sensitivity |
≤10μm |
Photothermal Pump Source Wavelengths |
266nm, 355nm, 532nm, 1064nm or customized |
Microscopic Imaging Lateral Resolution |
≤0.5μm |
Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.
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Automated detection.1
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Multi-mode scanning expansion capabilities.2
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Supports arbitrary area selection for testing on the screen.3
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Compatible with planar, spherical, and aspherical components.4