Hefei ZC Optoelectronic Technology Co., Ltd.
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Multi-Modal Defect Inspection Instrument For Large-Aperture Optics

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ProductIntroduction

The Multi-Modal Defect Inspection Instrument For Large-Aperture Optics (MMDI-2000-LA) integrates full-aperture rapid defect identification with sub-aperture high-sensitivity, high-resolution microscopic imaging. It employs laser scattering for full-aperture rapid scanning and imaging of large-aperture optical components, enabling statistical analysis of defect size, location, and morphology. The system combines multiple inspection modalities—including photothermal weak absorption, bright-field   microscopy, dark-field microscopy, and laser confocal microscopy—to focus on user-specified defect regions and extract detailed defect information.

ProductParameters

Multi-Modal Defect Inspection instrument For Large-Aperture Optics

Model

MMDI-2000-LA

Sample Size

≤500mm × 500mm

Inspection Modes

Laser Scattering, Photothermal Absorption, Bright-Field Microscopy, Dark-field Microscopy, Laser Confocal Microscopy, Scanned Image Comparison

Defect Detection Sensitivity

≤0.3μm

Photothermal Absorption Sensitivity

≤10ppb

Photothermal Absorption Spatial Resolution

≤10μm

Photothermal

266nm, 355nm, 532nm, 1064nm or customized

Microscopic Imaging Resolution

≤1μm

Microscopic Imaging Resolution

≤0.3μm

Laser Confocal Lateral Resolution

≤0.5μm

Laser Confocal Axial Resolution

≤1μm

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.

ProductFeatures
  • High-sensitivity defect detection for rapid defect localization.
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  • Sub-aperture high-resolution defect characterization.
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  • Effortless sample replacement without recalibration.
    3
  • Subsurface defect detection with high-resolution evaluation.
    4
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