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The Multi-Modal Defect Inspection Instrument For Large-Aperture Optics (MMDI-2000-LA) integrates full-aperture rapid defect identification with sub-aperture high-sensitivity, high-resolution microscopic imaging. It employs laser scattering for full-aperture rapid scanning and imaging of large-aperture optical components, enabling statistical analysis of defect size, location, and morphology. The system combines multiple inspection modalities—including photothermal weak absorption, bright-field microscopy, dark-field microscopy, and laser confocal microscopy—to focus on user-specified defect regions and extract detailed defect information.
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Multi-Modal Defect Inspection instrument For Large-Aperture Optics |
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Model |
MMDI-2000-LA |
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Sample Size |
≤500mm × 500mm |
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Inspection Modes |
Laser Scattering, Photothermal Absorption, Bright-Field Microscopy, Dark-field Microscopy, Laser Confocal Microscopy, Scanned Image Comparison |
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Defect Detection Sensitivity |
≤0.3μm |
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Photothermal Absorption Sensitivity |
≤10ppb |
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Photothermal Absorption Spatial Resolution |
≤10μm |
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Photothermal |
266nm, 355nm, 532nm, 1064nm or customized |
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Microscopic Imaging Resolution |
≤1μm |
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Microscopic Imaging Resolution |
≤0.3μm |
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Laser Confocal Lateral Resolution |
≤0.5μm |
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Laser Confocal Axial Resolution |
≤1μm |
Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.
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High-sensitivity defect detection for rapid defect localization.1
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Sub-aperture high-resolution defect characterization.2
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Effortless sample replacement without recalibration.3
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Subsurface defect detection with high-resolution evaluation.4
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